Critical Abrasives

Critical Abrasives offers a variety of innovative abrasive pads used in critical environment cleaning applications. Because our products are primarily used in cleanrooms and controlled environments, they are constructed of high quality fiber-free, closed-cell foam and laundered abrasives to ensure minimal particle counts. They also have very low Sodium, Iron, and Magnesium content which is ideal for various clitical environment cleaning applications.

Critical Abrasives has developed innovative products for the Semiconductor, Optical, and Solar Industries (NuFab Abrasive Pads) as well as the Pharmaceutical Industry (NuPharm Abrasive Pads).

NuFab Abrasive Pads

NuFab Abrasive Pads are designed to remove residue build-up on process equipment in high-tech environments, as well as other precision processes.

NuFab Abrasive Pads are engineered and manufactured in the USA for micro-precision cleaning, polishing, and finishing applications.

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What types of equipment are NuFab Abrasive Pads used on?

NuFab Abrasive Pads are very effective for use on Axcelis, Novellus, Varian, Plasmatherm, AMAT, LAM, TEL, Tegal, Hitachi, Gasonics, Mattson, and many other High Vacuum Tools, and are an economical way to quickly and easily remove stubborn residues from critical process equipment in Semiconductor, LCD, Wafer, MEMS, Optical and Disk Media facilities.

Why switch to NuFab Abrasive Pads?

Engineers can now improve vacuum chamber PM processes by reducing post PM particle counts, cleaning times, recovery times, and hazardous waste generated during PM. Engineers will find improved tool performance and reduced cost of ownership.

Why do NuFab Abrasive Pads work so well?

NuFab Abrasive Pads have an ultra-fine uniform abrasive finish. The extremely dense homogenous precision coating is bonded to a polyester film (not paper or fabric which can shed unwanted fibers), which is then bonded to a foam backing. This unique bonding system ensures no peeling or cracking – translating to high flexibility and intensive strength with extra-long wearing characteristics. With the homogeneous mass process, the grit is actually embedded into the bonding resin, as opposed to the grit laying on top of the resin. This process ensures minimized particulate shedding.

Our unique manufacturing process allows us to deliver the very best cleaning tool the semiconductor industry has ever seen.

NuFab Abrasive Pads can be used wet or dry and are impervious to most solvents. No special storage conditions are required as both the foam backing and bonding agents are stable within a wide range of temperature and humidity.

The tightly graded abrasive Diamond, Silicon Carbide, or Aluminum Oxide used in NuFab abrasive pads are first laundered to remove any unwanted particulate then permanently bonded to dense, closed-cell foam backing before being individually packaged. This process delivers a cleaning tool that can be confidently used in highly controlled environments.

When NuFab Abrasive Pads are used in conjunction with foam sponges and/or non-shedding microfiber wipers and swabs, the results are very impressive. Not only will your tools be extremely clean, you will save significant time on cleaning, and tool down time will be dramatically reduced.

NuFab Abrasive Pads are ideal for semiconductor applications where low particulate counts and very low Sodium, Iron, and Magnesium content are important.

Our pads have the lowest Sodium, Iron, and Magnesium content of any other product available.

Which NuFab Abrasive Pad is right for you?

The amount of residue/deposition on a surface or substrate depends on the duration and type of process the tool underwent. Additionally, there are different types of tool surfaces, depending on the tool. Therefore, each tool may require a different abrasive pad grit. The duration of the clean also varies depending on the amount of residue/deposition and the condition of the surface.

NuFab Abrasive Pads have the right grit for your application. Grits are available ranging from 250 to 220,000. The most popular grits are: 250, 325, 400, 600, 1200, 1500.

Ask your Critical Abrasives Representative which grit to use on your particular tool.

Diamond pads are used to remove very hard, glass-like residues like those from titanium nitride.
Silicon Carbide pads are used to remove hard residues from metal and hard polymer on aluminum, stainless steel, and ceramic surfaces.
Aluminum Oxide pads are used to remove residues in more delicate applications like anodized aluminum, quartz, polymer, and Lexan.

How can NuFab Pbrasive pads reduce operating costs?

4 simple steps in the cleaning process will improve tool performance, improve tool recovery time, eliminate fibers and particles, and reduce hazardous waste, all while saving your company a significant amount on money in reduced operating costs. Let your Critical Abrasives Representative show you an annual cost savings analysis for the tools you use.

Prep chamber for PM
Using a foam sponge wipe chamber with DI water continuously for 10-30 minutes, or until all loose Indium or other residues are removed
Lightly cleanse the source chamber with NuFab Abrasive Pad with DI water to easily remove the remaining deposition from chamber walls, unloading the deposition from the pad onto a sponge as needed, and using sponge to wipe out source chamber periodically until all deposition has been removed and the chamber is clean
Use a clean non-shedding microfiber wiper with a small amount of IPA to do a final wipe down of the entire source chamber to remove any moisture and/or particles

(Materials list needed for best results: NuFab Abrasive Pad, Foam sponge, Non-shedding microfiber wipers and/or swabs, DI water, IPA)

With NuFab Abrasive Pads it has never been easier to clean vacuum chambers and components.

Will NuFab Abrasive Pads replace the cleaning items we use now?

Many legacy items currently used for process cleaning in the semiconductor industry were never intended for this type of critical cleaning. Thus, many of these products have very high particulate counts as well as high levels of sodium, iron, and magnesium. These don't need to be used anymore. Hydrogen Peroxide and other dangerous chemicals can now also be eliminated, making the job of cleaning vacuum chambers safer for the engineers as well as the entire facility.

Problematic products/procedures traditionally used in the chamber cleaning process that will now be eliminated:

Scotch-Brite Pads – generate unwanted fibers and particles
Sandpaper – generate unwanted fibers and particles
Hydrogen Peroxide – generate dangerous chemical exposure
Scrapers – can cause scratching on critical surfaces
Bead Blasting/Oven Baking – can damage critical surfaces

With the use of NuFab Abrasive Pads Engineers can now dramatically improve vacuum chamber PM processes by reducing post PM particle counts, cleaning times, recovery times, and hazardous waste generated during PM.

NuPharm Abrasive Pads

Rust remediation is a growing concern in pharmaceutical cleanrooms. Harsh cleaning chemicals used to kill bacteria will eventually take their toll on expensive stainless steel equipment. This equipment needs to remain free of rust and corrosion in order to remain safe and bacteria free. NuPharm Abrasive Pads will not only remove rust, corrosion, and rouge, but will also bring the damaged stainless steel back to a smooth, polished, and like-new condition so bacteria like Bacillus Cereus can no longer hide.

Corrosion of stainless steel in a controlled environment has become a major concern in the Pharmaceutical Industry. Corrosion on stainless steel leads to pitting in the surface, and that pitting can harbor dangerous bacteria in your cleanroom, potentially compromising your end product.

NuPharm Abrasive Pads are perfect for removing and controlling stainless steel corrosion, rusting, and rouge in pharmaceutical cleanrooms.

Corroded process equipment, components, welded joints, and many other stainless steel surfaces are brought back to like-new condition quickly and easily by polishing with NuPharm Abrasive Pads.